製品情報

Electrolysis Ozone Water / Hydrogen Water Generator

Feature

・ It is possible to use their ozone water and hydrogen water generator together or separately.
・ Two features are realized at minimum cost by making the size compact.
・ It is possible to flexibly adjust the flow level and concentration.



Electrolysis ozone water/hydrogen water generator process


fig: Electrolysis ozone water/hydrogen water generator process

Standard model data

Model Name Ozone
water
density
(mg/L)
Amount
of ozone
water
(L/min.)
Hydrogen water
concentration
(mg/L)
Flow rate of
hydrogen
water
(L/min.)
Dimension
(WxDxH mm)
Weight
(kg)
Power
capacity
(kVA)
POHW-101010-S 10 10 > 1 10 900
x1,000
x1,900
650 5.4
(3φ AC200V)
POHW-201010-S 20 10 > 1 10 900
x1,000
x1,900
700 11.9
(3φ AC200V)

Utility


1. Power (confirm voltage and frequency)
2. Pure water (super pure water at more than 17MΩ/cm. Water temperature is lower than 25
   degree. Dissolved O2 gas concentration is less than 500ppb. Content hydrogen peroxide
   density is less than 50ppb)
3. Cooling water (23 degree ±3 degree)
4. Control air (0.5-0.7MPa)
5. Exhaust duct
6. Drain line (gravity flow or pump discharge.)


Optional


1. Ozone water booster unit
2. Agent injection unit


Type symbol


型式記号サンプル
a. Electrolysis ozone water generator (POHW)
b. Ozone density Example: 10mg/L to 10, 20mg/L to 20, 60mg/L to 60
c. Ozone water flow amount Example: 10L/min. to 10, 20L/min. to 20
d. Ozone water flow amount Example: 10L/min. to 10, 70L/min. to 70
e. Grade of semiconductor production unit (S)
f. No symbol to Standard, P to Booster pump is embedded



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