Products

Electrolysis Ozone Gas Generator

Feature

・Consistently supply ozone gas at more than 200g/m3(N)
・Possible to supply dry ozone gas (with dryer)
・The level of ozone gas generation can be freely adjusted



Usage

Semiconductor production field: For CVD, it is used as an oxidant by mixing with fomentation.



Ozone gas generation process

fig: Ozone gas generation process

Standard model data

Model Name Ozone gas
density
(g/m3(N))
Amount of
ozone gas
(g/hr)
Dimension
(WxDxHmm)
Weight
(kg)
Power capacity
(kVA)
POG-24-S > 200 > 24 600x800x1,500 250 6.8(3φAC200V)
POG-48-S > 200 > 48 600x800x1,700 350 11.9(3φAC200V)
POG-120-S > 200 > 120 1,200x1,300x2,000 500 18(3φAC200V)

Utility


1. Power (confirm voltage and frequency)
2. Pure water (super pure water at more than 2MΩ/cm)
3. Cooling water (23 degree ±3 degree)
4. Control air (0.5-0.7MPa)
5. Heat exhaust duct
6. Drain line (gravity flow)

Optional


1. Exhaust ozone gas separator/catalyzer
2. Ozone gas dryer (dew point lower than -70 degree)
3. High-pressure ozone gas generation unit (-400kPa)
4. Environment ozone monitor

Type symbol


型式記号サンプル
a. Electrolysis ozone gas generator (POG)
b. Ozone gas generation level (Example: 4g/hr to 04, 48g/hr to 48, 240g/hr to 240)
c. Grade of semiconductor production unit (S)
d. No symbol to Standard


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